High Energy Density Cellular Electrostatic In-Plane 2-Axis Actuators

نویسندگان

چکیده

This work reports a class of silicon micromachined millimeter scale electrostatic actuator capable both axial and lateral in-plane displacement with relatively high energy density. The is comprised large-scale integrated array individual parallel-plate cells. force cells within the add up providing large actuation output for actuators. non-conventional fabrication process allows realization submicron transduction airgaps lowering voltage. also electrical isolation different so that sections ribbon can be actuated independently enabling deformation in addition to contraction. Axial $20.50~\mu \text{m}$ has been shown 2010 notation="LaTeX">$\mu \text{m}\,\,\times 1000\,\,\mu fabricated actuator. as 10.3 mN demonstrating maximum density 1.11 mJ/cm notation="LaTeX">$^{\mathbf {3.}}$ same demonstrated 10.11 {\mathrm{ m}}$ . [2022-0150]

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ژورنال

عنوان ژورنال: Journal of microelectromechanical systems

سال: 2023

ISSN: ['1941-0158', '1057-7157']

DOI: https://doi.org/10.1109/jmems.2022.3221151